Monitor pattern of semiconductor device and method of manufacturing semiconductor device

ABSTRACT

A plurality of diffused resistors and a plurality of wirings (resistive elements) are alternately disposed along a virtual line, and those diffused resistors and wirings are connected in series by contact vias. In the same wiring layer as that of the wirings, a dummy pattern is formed so as to surround a formation region of the wirings and the diffused resistors. A space between the dummy pattern and the wirings is set in accordance with, for example, a minimum space between wirings in a chip formation portion.

CROSS-REFERENCE TO RELATED APPLICATIONS

This Application is a divisional of application Ser. No. 12/379,967filed Mar. 5, 2009; which is a divisional of a application Ser. No.11/273,294 filed Nov. 15, 2005; which is a divisional of applicationSer. No. 10/447,956 filed May 30, 2003; which is based upon and claimspriority of Japanese Patent Application No. 2002-162061, filed on Jun.3, 2002, the contents being incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a monitor pattern of a semiconductordevice, which detects abnormality of wiring (including a contactportion) occurring in manufacturing steps of the semiconductor device,and to a method of manufacturing the semiconductor device.

2. Description of the Prior Art

In recent years, along with miniaturization of a semiconductor device,demand for a system LSI has been growing. In the system LSI, because ofa great difference in wiring density between a portion where the wiringis not dense and a portion where the wiring is dense, manufacturingconditions are not even between the two portions. Thus, thinning of thewiring, contact failure, disconnection, short-circuiting and the likeare likely to occur. Accordingly, an electrically isolated dummy patternis provided in the portion where the wiring is not dense, thus setting apattern density in a constant range.

Moreover, in some cases, a monitor pattern is previously provided in asemiconductor substrate (a wafer). The monitor pattern is formedsimultaneously with normal wiring and is used in order to electricallyexamine whether or not a pattern width exceeds its allowable range andwhether or not a contact is normal.

FIG. 1A is a top plan view showing an example of a monitor patternprovided in a conventional semiconductor device, and FIG. 1B is across-section view thereof.

On a semiconductor substrate 10, an impurity diffusion layer (not shown)constituting elements such as a transistor and the like is formed, and aplurality of wiring layers are formed thereon while sandwiching aninterlayer insulation film therebetween. An impurity diffusion regionand wirings of the respective wiring layers are connected via contactvias buried in the interlayer insulation film, and thus a predeterminedcircuit is constituted.

As shown in FIGS. 1A and 1B, the monitor pattern is constituted by: aplurality of lower-layer wirings 11 formed in line on a first interlayerinsulation film (not shown); a plurality of upper-layer wirings 14formed in line on a second interlayer insulation film 12; and contactvias 13 buried in the second interlayer insulation film 12. Therespective lower-layer wirings 11 electrically connect the upper-layerwirings 14, which are mutually adjacent with each other via the contactvias 13.

In general, widths of the lower-layer wiring 11 and of the upper-layerwiring 14 are set to be minimum line widths decided on design criteria.For example, as a monitor pattern, one having the lower-layer wiring 11and upper-layer wiring 14, which are 0.3 fÊm in width, 0.9 fÊm in lengthand having the contact vias 13 of which number is set to 100 iscurrently used.

FIG. 2 is a top plan view showing another example of the conventionalmonitor pattern. This monitor pattern 16 is constituted by one wiring,which is bent repeatedly. A width of the wiring is set to a minimum linewidth decided on the design criteria. Conventionally, as a monitorpattern of this kind, for example, one is used, in which the width ofthe wiring is set to 0.3 fÊm and a length (a total length) thereof isset to 100 fÊm.

The monitor patterns described above are formed on a scribe line of thewafer, that is, in a region between chip formation portions. Electricalcharacteristics (such as a resistance value and the like) of the monitorpattern are measured by a detection device. When the electricalcharacteristics are within a predetermined range, a manufacturingcondition can be determined to be appropriate. On the other hand, whenthe electrical characteristics of the monitor pattern are out of thepredetermined range, there is a high possibility that problems occursuch as thinning of the wiring, contact failure, short-circuiting,disconnection and the like.

However, the inventors of the present application and the like considerthat the conventional monitor pattern described above has a problemdescribed below.

FIG. 3A is a graph showing a relationship between a pattern occupyingratio, which is indicated by a horizontal axis, and a frequency ofconstrictions generated in a wiring, which is indicated by a verticalaxis. In the case where a space between a wiring and a peripheral wiringof it is large (large space), even if the pattern occupying ratio issmall, the constriction is not generated. However, in the case where thespace between a wiring and a peripheral wiring of it is small (smallspace), when the pattern occupying ratio is small, a constriction (anundercut) 23 of a wiring as shown in FIG. 3B is generated. Note that, inFIG. 3B, reference numeral 21 indicates a barrier metal and referencenumeral 22 indicates an Al (aluminum) wiring.

The above problem can be conceived as below. Specifically, when a wiringis formed by dry etching, an organic substance (an organic substancereleased from a resist film) covers a sidewall of the wiring, as theetching is performed, and protects the wiring from an etching gas.Particularly, in the case of using Al (aluminum) as a wiring material,since Al is apt to react to Cl (chlorine) in the etching gas, it isnecessary to cover the entire sidewall of the wiring 22 with the organicsubstance.

However, when the pattern occupying ratio (a wiring occupying area) issmall, an amount of the organic substance supplied from the resist filmis relatively decreased. Thus, it becomes impossible to cover a lowerportion of the Al wiring 22 with the organic substance. As a result, asshown in FIG. 3B, the constriction 23 is generated in the lower portionof the Al wiring 22.

Because the monitor pattern is formed in a place away from the chipformation portion, such as on the scribe line, a space between themonitor pattern and other patterns is large, thus making it difficultfor the constriction to be generated. On the other hand, in the chipformation portion, the space therebetween is small, and thus theconstriction is likely to be generated. Therefore, even if noabnormality is detected by the electrical examination of the monitorpattern, it cannot be completely said that there is no abnormality inthe wiring in the chip formation portion.

FIGS. 4A and 4B are top plan views showing examples of patterns,respectively, in which failure is likely to occur. FIGS. 4C and 4D areperspective views thereof, respectively. As shown in the drawings, asfor patterns 31 a and 31 b surrounded by other patterns 32 a and 32 b,respectively, in circled portions the constriction is likely to begenerated, the constriction being dependent on the pattern occupyingratio, as shown in FIG. 3B.

A wiring structure which is considered most likely to lead to failureincludes, as shown in FIG. 5, a portion where a lower-layer wiring (Alwiring) 42 and an upper-layer wiring (Al wiring) 46 are connected by useof a contact via 44. Usually, a barrier metal 41 is formed below thelower-layer wiring 42, and a reflection preventing film (for example, aTiN film) 43 is formed thereon. Moreover, a barrier metal 45 is alsoformed below the upper-layer wiring 46, and a reflection preventing film47 is formed thereon. In such portions, constrictions are generated inan upper portion of the lower-layer wiring 42 (below the reflectionpreventing film 43) and in a lower portion of the upper-layer wiring 46(above the barrier metal 45). Accordingly, contact resistance betweenthe lower-layer wiring 42 and the upper-layer wiring 46 is increased,thus leading to a defective product in extreme cases.

However, as described above, the electrical examination by use of theconventional monitor pattern may not be able to detect abnormality ofthe wiring in the chip formation portion. Thus, necessity ofcross-section observation and the like arises in order to identify thecause of the failure. Therefore, a lot time is required to examine thecause and take measures therefore, resulting in a delay of a feedbackinto manufacturing steps.

SUMMARY OF THE INVENTION

In consideration for the above, an object of the present invention is toprovide a monitor pattern of a semiconductor device, which is capable ofmore accurately detecting abnormality of wiring and a contact portion ina chip formation portion, and to provide a method of manufacturing asemiconductor device using the monitor pattern.

The monitor pattern of the semiconductor device according to the presentinvention includes: a resistive element formed on a semiconductorsubstrate; and a dummy pattern formed close to the resistive element inthe same wiring layer as that of the resistive element.

In the present invention, the dummy pattern is formed close to theresistive element. The resistive element and the dummy pattern areformed by use of, for example, the same material as that of the wiringin the chip formation portion. Then, a space between the resistiveelement and the dummy pattern is set to a minimum space between wirings(or a minimum space between wirings in the chip formation portion),which is decided based on design criteria, for example. Thus, anoccurrence rate of constrictions and contact abnormality in the monitorpattern becomes equal to that in the chip formation portion. Therefore,when abnormality is detected in the wiring or in the contact portion byperforming electrical examination on the monitor pattern, there is ahigh possibility that the abnormality of the wiring or the contactportion also occurs in the chip formation portion. Thus, the monitorpattern enables a relatively accurate conjecture as to the presence ofthe abnormality in the chip formation portion. Then, a result thereof isfed back to manufacturing steps, and an appropriate manufacturingcondition is maintained. Thus, a quality of the semiconductor device isimproved, and a manufacturing yield is also improved.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a top plan view showing an example of a monitor patternprovided in a conventional semiconductor device, and FIG. 1B is across-section view thereof.

FIG. 2 is a top plan view showing another example of a conventionalmonitor pattern.

FIG. 3A is a graph showing a relationship between a pattern occupyingratio and a frequency of constrictions, and FIG. 3B is a schematiccross-section view showing a constriction (undercut) of a wiring.

FIGS. 4A and 4B are top plan views showing pattern examples in whichfailure is likely to occur, and FIGS. 4C and 4D are perspective viewsthereof.

FIG. 5 is a schematic cross-section view showing an example of a wiringstructure in which failure is considered to be most likely to occur.

FIG. 6 is a top plan view showing a monitor pattern of a semiconductordevice of a first embodiment of the present invention.

FIG. 7A is a cross-section view along I-I line of FIG. 6, and FIG. 7B isa cross-section view along II-II line of FIG. 6.

FIG. 8 is a graph showing a result obtained by numerically evaluatingpossibilities of constriction generation in association with an aspectratio.

FIG. 9 is a top plan view showing a monitor pattern of a semiconductordevice of a second embodiment of the present invention.

FIG. 10A is a cross-section view along I-I line of FIG. 9, and FIG. 10Bis a cross-section view along II-II line of FIG. 9.

FIG. 11 is a schematic view showing a favorable relationship between adummy pattern and a wiring in a folded-back portion of a monitorpattern.

FIG. 12A is a top plan view showing a part (a cell) of a monitor patternof a semiconductor device of a third embodiment of the presentinvention, and FIG. 12B is a perspective view thereof.

FIG. 13 is a top plan view showing a modified example of the thirdembodiment.

FIG. 14 is a top plan view showing a monitor pattern of a semiconductordevice of a fourth embodiment of the present invention.

FIG. 15A is a cross-section view along I-I line of FIG. 14, and FIG. 15Bis a cross-section view along II-II line of FIG. 14.

FIG. 16 is a top plan view showing a monitor pattern of a semiconductordevice of a fifth embodiment of the present invention.

FIG. 17A is a cross-section view along I-I line of FIG. 16, and FIG. 17Bis a cross-section view along II-II line of FIG. 16.

FIG. 18 is a top plan view showing a monitor pattern of a semiconductordevice of a sixth embodiment of the present invention.

FIG. 19A is a cross-section view along I-I line of FIG. 18, and FIG. 19Bis a cross-section view along II-II line of FIG. 18.

FIG. 20 is a plan view showing a monitor pattern of a modified exampleof the sixth embodiment.

FIG. 21A is a cross-section view along I-I line of FIG. 20, and FIG. 21Bis a cross-section view along II-II line of FIG. 20.

FIG. 22 is a top plan view showing a monitor pattern of a semiconductordevice of a seventh embodiment of the present invention.

FIG. 23A is a cross-section view along I-I line of FIG. 22, and FIG. 23Bis a cross-section view along II-II line of FIG. 22.

FIG. 24 is a top plan view showing a monitor pattern of a modifiedexample of the seventh embodiment.

FIG. 25A is a cross-section view along I-I line of FIG. 24, and FIG. 25Bis a cross-section view along II-II line of FIG. 24.

FIG. 26 is a top plan view showing a monitor pattern of a semiconductordevice of an eighth embodiment of the present invention.

FIG. 27A is a cross-section view along I-I line of FIG. 26, and FIG. 27Bis a cross-section view along II-II line of FIG. 26.

FIG. 28 is a top plan view showing a monitor pattern of a semiconductordevice of a ninth embodiment of the present invention.

FIG. 29A is a cross-section view along I-I line of FIG. 28, and FIG. 29Bis a cross-section view along II-II line of FIG. 28.

FIG. 30 is a top plan view showing a monitor pattern of a semiconductordevice of a tenth embodiment of the present invention.

FIG. 31A is a cross-section view along I-I line of FIG. 30, and FIG. 31Bis a cross-section view along II-II line of FIG. 30.

FIG. 32 is a top plan view showing a monitor pattern of a semiconductordevice of an eleventh embodiment of the present invention.

FIG. 33A is a cross-section view along I-I line of FIG. 32, and FIG. 33Bis a cross-section view along II-II line of FIG. 32.

FIG. 34 is a top plan view showing a monitor pattern of a semiconductordevice of a twelfth embodiment of the present invention.

FIG. 35A is a cross-section view along I-I line of FIG. 34, and FIG. 35Bis a cross-section view along II-II line of FIG. 34.

FIG. 36 is a top plan view showing a monitor pattern of a semiconductordevice of a thirteenth embodiment of the present invention.

FIG. 37A is a cross-section view along I-I line of FIG. 36, and FIG. 37Bis a cross-section view along II-II line of FIG. 36.

FIG. 38 is a top plan view showing a monitor pattern of a semiconductordevice of a fourteenth embodiment of the present invention.

FIG. 39A is a cross-section view along I-I line of FIG. 38, and FIG. 39Bis a cross-section view along II-II line of FIG. 38.

FIG. 40 is a top plan view showing a monitor pattern of a semiconductordevice of a fifteenth embodiment of the present invention.

FIG. 41A is a cross-section view along I-I line of FIG. 40, and FIG. 41Bis a cross-section view along II-II line of FIG. 40.

FIG. 42 is a top plan view showing a monitor pattern of a semiconductordevice of a sixteenth embodiment of the present invention.

FIG. 43A is a cross-section view along I-I line of FIG. 42, and FIG. 43Bis a cross-section view along II-II line of FIG. 42.

FIG. 44 is a top plan view showing a monitor pattern of a semiconductordevice of a seventeenth embodiment of the present invention.

FIG. 45A is a cross-section view along I-I line of FIG. 44, and FIG. 45Bis a cross-section view along II-II line of FIG. 44.

FIG. 46 is a graph showing changes in a resistance value in accordancewith a degree of a positional change and presence of a constriction.

FIG. 47 is a top plan view showing one cell of a first monitor patternaccording to an eighteenth embodiment of the present invention.

FIG. 48A is a cross-section view along I-I line of FIG. 47, and FIG. 48Bis a cross-section view along II-II line of FIG. 47.

FIG. 49 is a top plan view showing one cell of a second monitor patternaccording to the eighteenth embodiment.

FIG. 50A is a cross-section view along I-I line of FIG. 49, and FIG. 50Bis a cross-section view along II-II line of FIG. 49.

FIG. 51 is a top plan view showing one cell of a third monitor patternaccording to the eighteenth embodiment.

FIG. 52A is a cross-section view along I-I line of FIG. 51, and FIG. 52Bis a cross-section view along II-II line of FIG. 51.

FIG. 53 is a top plan view showing one cell of a monitor pattern of asemiconductor device of a nineteenth embodiment of the presentinvention.

FIG. 54A is a cross-section view along I-I line of FIG. 53, FIG. 54B isa cross-section view along II-II line of FIG. 53 and FIG. 54C is across-section view along III-III line of FIG. 53.

FIG. 55 is a top plan view showing one cell of a monitor pattern of asemiconductor device of a twentieth embodiment of the present invention.

FIG. 56A is a cross-section view along I-I line of FIG. 55, FIG. 56B isa cross-section view along II-II line of FIG. 55 and FIG. 56C is across-section view along III-III line of FIG. 55.

FIG. 57 is a top plan view showing a first monitor pattern 231 of asemiconductor device of a twenty-first embodiment of the presentinvention.

FIG. 58A is a cross-section view along I-I line of FIG. 57, and FIG. 58Bis a cross-section view along II-II line of FIG. 57.

FIG. 59 is a top plan view showing a second monitor pattern of thetwenty-first embodiment.

FIG. 60A is a cross-section view along I-I line of FIG. 59, and FIG. 60Bis a cross-section view along II-II line of FIG. 59.

FIG. 61 is a top plan view showing a third monitor pattern of thetwenty-first embodiment.

FIG. 62A is a cross-section view along I-I line of FIG. 61, and FIG. 62Bis a cross-section view along II-II line of FIG. 61.

FIG. 63 is a top plan view showing a first monitor pattern of asemiconductor device of a twenty-second embodiment of the presentinvention.

FIG. 64A is a cross-section view along I-I line of FIG. 63, and FIG. 64Bis a cross-section view along II-II line of FIG. 63.

FIG. 65 is a top plan view showing a second monitor pattern of thesemiconductor device of the twenty-second embodiment.

FIG. 66A is a cross-section view along I-I line of FIG. 65, and FIG. 66Bis a cross-section view along II-II line of FIG. 65.

FIG. 67 is a top plan view showing a third monitor pattern of thesemiconductor device of the twenty-second embodiment.

FIG. 68A is a cross-section view along I-I line of FIG. 67, and FIG. 68Bis a cross-section view along II-II line of FIG. 67.

FIG. 69 is a top plan view showing a first monitor pattern of asemiconductor device of a twenty-third embodiment of the presentinvention.

FIG. 70A is a cross-section view along I-I line of FIG. 69, FIG. 70B isa cross-section view along II-II line of FIG. 69 and FIG. 70C is across-section view along III-III line of FIG. 69.

FIG. 71 is a top plan view showing a second monitor pattern of thetwenty-third embodiment.

FIG. 72A is a cross-section view along I-I line of FIG. 71, FIG. 72B isa cross-section view along II-II line of FIG. 71 and FIG. 72C is across-section view along III-III line of FIG. 71.

FIG. 73 is a top plan view showing a first monitor pattern of asemiconductor device of a twenty-fourth embodiment of the presentinvention.

FIG. 74A is a cross-section view along I-I line of FIG. 73, FIG. 74B isa cross-section view along II-II line of FIG. 73 and FIG. 74C is across-section view along III-III line of FIG. 73.

FIG. 75 is a top plan view showing a second monitor pattern of thetwenty-fourth embodiment.

FIG. 76A is a cross-section view along I-I line of FIG. 75, FIG. 76B isa cross-section view along II-II line of FIG. 75 and FIG. 76C is across-section view along III-III line of FIG. 75.

FIG. 77 is a top plan view showing a monitor pattern of a semiconductordevice of a twenty-fifth embodiment of the present invention.

FIG. 78A is a cross-section view along I-I line of FIG. 77, and FIG. 78Bis a cross-section view along II-II line of FIG. 77.

FIG. 79 is a top plan view showing a monitor pattern of a semiconductordevice of a twenty-sixth embodiment of the present invention.

FIG. 80A is a cross-section view along I-I line of FIG. 79, and FIG. 80Bis a cross-section view along II-II line of FIG. 79.

FIG. 81 is a top plan view showing a cell of a monitor pattern of asemiconductor device of a twenty-seventh embodiment of the presentinvention.

FIG. 82 is a top plan view showing the monitor pattern of thesemiconductor device of the twenty-seventh embodiment.

FIG. 83A is a cross-section view along I-I line of FIG. 82, and FIG. 83Bis a cross-section view along II-II line of FIG. 82.

FIG. 84 is a top plan view showing the monitor pattern of thesemiconductor device of the twenty-seventh embodiment of the presentinvention.

FIG. 85A is a cross-section view along I-I line of FIG. 84, and FIG. 85Bis a cross-section view along II-II line of FIG. 84.

DESCRIPTION OF THE PREFERRED EMBODIMENT

Hereinafter, description will be made for embodiments of the presentinvention with reference to the accompanying drawings.

(First Embodiment)

FIG. 6 is a top plan view showing a monitor pattern of a semiconductordevice of a first embodiment of the present invention. FIG. 7A is across-section view along I-I line of FIG. 6, and FIG. 7B is across-section view along II-II line of FIG. 6.

A semiconductor substrate (wafer) 101 is separated into a plurality ofelement regions by an element separation film 102. In the elementregions, a plurality of diffused resistors 103 are provided, which areformed by introducing impurities at high concentration into thesemiconductor substrate 101. Moreover, on the semiconductor substrate101, an interlayer insulation film 104 is formed. On this interlayerinsulation film 104, a plurality of wirings (resistive elements) 106 areformed.

These diffused resistors 103 and wirings 106 are alternately disposedalong one virtual line 100 turning more than once (three times in thedrawing). Moreover, in the interlayer insulation film 104, a pluralityof contact vias 105 are buried, by which the wirings 106 and thediffused resistors 103 are electrically connected in series.

Furthermore, on the interlayer insulation film 104, a dummy pattern 107is formed so as to surround a region where such wirings 106 and diffusedresistors 103 are formed. This dummy pattern 107 is formed in the samewiring layer as that of the wirings 106. Note that the wirings 106positioned at ends of the monitor pattern extend out of the dummypattern 107 through notched portions of the dummy pattern 107.

It is preferable that widths of the wirings 106 and the diffusedresistors 103 are set in accordance with a minimum line width decidedbased on design criteria or a minimum space between wirings in a chipformation portion. Each of the wirings 106 has, for example, a width of0.3 fÊm and a length of 0.9 fÊm. Moreover, each of the diffusedresistors 103 has a width of 0.6 fÊm and a length of 0.9 fÊm.Furthermore, a space between the wirings 106 and the dummy pattern 107is preferably set to the minimum space between the wirings, which isdecided based on the design criteria. In this example, the space betweenthe wirings 106 and the dummy pattern 107 is 0.3 fÊm.

The wiring 106 and the dummy pattern 107 are formed in such a manner,for example, that an aluminum film having a thickness of 500 nm isformed on a barrier metal having a thickness of 60 nm (Ti: 10 nm+TiN: 50nm) and these films are etched by a photolithography method.

Note that a length of the wiring 106 needs to be longer than a minimumspace between the contact vias, which is decided based on the designcriteria.

Moreover, in etching the space between the wirings 106 and the dummypattern 107, an aspect ratio to a height of a wiring material includinga mask material before the etching (for example, a resist film) is setto 3 or more. When a detection sensitivity of constrictions is to beincreased, an aspect ratio of the space between the wirings 106 and thedummy pattern 107 is preferably set to 4.5 or more.

For example, in the case of forming the wirings 106 and the dummypattern 107 by forming a resist film having a thickness of 1 fÊm on aconductor film having a thickness of 560 nm (Ti: 10 nm+TiN: 50 nm+Al:500 nm) and then etching the conductor film, a height of the wiringmaterial including the mask material is 1.56 fÊm and the space betweenthe wirings 106 and the dummy pattern 107 is 0.3 fÊm. Thus, the aspectratio of the space between the wirings 106 and the dummy pattern 107 is5.2.

The monitor pattern of this embodiment is formed simultaneously withelements, such as a transistor and the like, constituting asemiconductor device and with the wirings. For example, when asource/drain of the transistor is formed, the diffused resistors 103 areformed by introducing impurities also into a diffused resistor formationregion. Moreover, the interlayer insulation film 104 is formedsimultaneously with an interlayer insulation film covering a gate of thetransistor. Furthermore, the contact vias 105 are formed simultaneouslywith contact vias connected to the source/drain of the transistor. Thewirings 106 are formed simultaneously with wirings connecting theelements.

After forming the monitor pattern of this embodiment simultaneously withthe semiconductor device as described above, the monitor pattern iselectrically examined by use of an examination device, thus determiningpresence of abnormality in accordance with a result of the examination.Then, the determination result is fed back to manufacturing steps, andan appropriate manufacturing condition (an etching condition and thelike) is maintained. Thus, a quality of the semiconductor device isimproved and a manufacturing yield is also improved.

In this embodiment, since the dummy pattern 107 is disposed in thevicinity of the wirings 106 constituting the monitor pattern, thedetection sensitivity of the constrictions is improved. Thus, moreaccurate determination of whether or not the constrictions are generatedcan be made with respect to the wirings formed with high density in thechip formation portion.

FIG. 8 is a graph showing a result obtained by numerically evaluatingpossibilities of constriction generation, in which an aspect ratio (anaspect ratio including a mask material before etching) is indicated by ahorizontal axis and a constriction generation rate is indicated by avertical axis. Note that, regarding the constriction generation rate,when the numerical value is 0, there is no possibility of constrictiongeneration, and the larger the value is, the higher the possibility ofthe constriction generation is. Moreover, the value of 1 or moreindicates that the possibility of the constriction generation is high,and the value of 2 or more indicates that the constriction is generatedalmost certainly. As is clear from FIG. 8, when the aspect ratio is 3,the constriction generation rate is 1, and when the aspect ratio is 4.5,the constriction generation rate is 2.

As described above, the detection sensitivity of the constrictiongeneration can be adjusted by adjusting the space between the wirings106 and the dummy pattern 107.

(Second Embodiment)

FIG. 9 is a top plan view showing a monitor pattern of a semiconductordevice of a second embodiment of the present invention. FIG. 10A is across-section view along I-I line of FIG. 9, and FIG. 10B is across-section view along II-II line of FIG. 9. Note that, in FIGS. 9,10A and 10B, identical constituent components to those of FIGS. 6, 7Aand 7B are denoted by identical reference numerals.

Also in this embodiment, similarly to the first embodiment, theplurality of diffused resistors 103, which are formed by introducingimpurities at high concentration into the semiconductor substrate 101,are provided in the semiconductor substrate 101. Moreover, on theinterlayer insulation film 104, the plurality of wirings (resistiveelements) 106 are formed in lines. These diffused resistors 103 andwirings 106 are alternately disposed along the one virtual line 100turning more than once (three times in the drawing). Moreover, in theinterlayer insulation film 104, the plurality of contact vias 105 areburied, by which the wirings 106 and the diffused resistors 103 areelectrically connected in series.

Furthermore, at both sides of each of the wirings 106 in its widthdirection, dummy patterns 111 extending in a longitudinal direction ofthe wiring 106 are formed. These dummy patterns 111 are formed in thesame wiring layer as that of the wirings 106.

The diffused resistors 103, the contact vias 105 and the wirings 106 areformed simultaneously with the elements and wirings in the chipformation portion.

Also in this embodiment, similarly to the first embodiment, theelectrical examination on the monitor pattern makes it possible to givean effect that defects such as thinning of the wirings in the chipformation portion and the like can be detected more surely than theconventional case.

Note that, in this embodiment, in a folded-back portion of the monitorpattern, as shown in FIG. 11, the dummy patterns 111 are preferablydisposed so as to extend out of an edge of the wiring 106 by a lengthY2, which is at least ½ or more of a width Y1 of the wiring 106.Accordingly, thinning of the wiring in the folded-back portion can bedetected more surely.

(Third Embodiment)

FIG. 12A is a top plan view showing a part (a cell) of a monitor patternof a semiconductor device of a third embodiment of the presentinvention. FIG. 12B is a perspective view thereof.

In the second embodiment, the dummy patterns 111 are disposed only atthe both sides of the wiring 106 in its width direction. In thisembodiment, a dummy pattern 112 is disposed so as to surround the wiring106. Note that, also in this embodiment, similarly to the secondembodiment, the plurality of wirings 106 are connected in series bymeans of the diffused resistors (not shown) and the contact vias 105.

In this case, a space between the wiring 106 and the dummy pattern 112is set so as to have an aspect ratio of 3 or more to a height of awiring material including a mask material. When a detection sensitivityto a constriction is to be increased, the aspect ratio in etchingbetween the wiring 106 and the dummy pattern 112 is preferably set to4.5 or more.

Moreover, as shown in FIG. 13, a notch may be provided in a part of thedummy pattern 112. Note that, in order to maintain the detectionsensitivity to the thinning of the wiring 106, a length (overlap) Y3from the end of the wiring 106 to the notch is preferably set to ½ ormore of the width Y1 of the wiring 106.

Also in this embodiment, similarly to the first embodiment, theelectrical examination on the monitor pattern is made possible to givean effect that defects such as thinning of the wirings in the chipformation portion and the like can be detected more surely than theconventional case.

(Fourth Embodiment)

FIG. 14 is a top plan view showing a monitor pattern of a semiconductordevice of a fourth embodiment of the present invention. FIG. 15A is across-section view along I-I line of FIG. 14, and FIG. 15B is across-section view along II-II line of FIG. 14.

On the semiconductor substrate 101, a plurality of lower-layer wirings(resistive elements) 121 on a first interlayer insulation film (notshown) are formed. These lower-layer wirings 121 are covered with asecond interlayer insulation film 123, and a plurality of upper-layerwirings (resistive elements) 125 are formed on the second interlayerinsulation film 123.

These lower-layer wirings 121 and upper-layer wirings 125 arealternately disposed along the one virtual line 100 turning more thanonce (three times in the drawing). Moreover, in the second interlayerinsulation film 123, a plurality of contact vias 124 are buried, bywhich the lower-layer wirings 121 and the upper-layer wirings 125 areelectrically connected in series.

In the same wiring layer as that of the lower-layer wirings 121, alower-layer dummy pattern 122 is formed so as to surround a region wherethe lower-layer wirings 121 and the upper-layer wirings 125 are formed.Moreover, also in the same wiring layer as that of the upper-layerwirings 125, an upper-layer dummy pattern 126 is formed so as tosurround the region where the lower-layer wirings 121 and theupper-layer wirings 125 are formed. Note that the upper-layer wirings125 positioned at ends of the monitor pattern extend out of notchedportions of the upper-layer dummy pattern 126.

It is preferable that widths of the lower-layer wiring 121 and theupper-layer wiring 125 are set to a minimum line width decided based ondesign criteria. For example, both of the lower-layer wiring 121 andupper-layer wiring 125 have a width of 0.3 fÊm and a length of 0.9 fÊm.

Moreover, a space between the lower-layer wiring 121 and the lower-layerdummy pattern 122 and a space between the upper-layer wiring 125 and theupper-layer dummy pattern 126 may be set in accordance with a minimumspace between wirings in a chip formation portion.

The monitor pattern of this embodiment is also formed simultaneouslywith the elements and wirings constituting the semiconductor device. Forexample, the lower-layer wirings 121 and lower-layer dummy pattern 122of the monitor pattern are formed simultaneously with formation oflower-layer wirings in the chip formation portion, the contact vias 124of the monitor pattern are formed simultaneously with formation ofcontact vias in the chip formation portion, and the upper-layer wirings125 and upper-layer dummy pattern 126 of the monitor pattern are formedsimultaneously with formation of upper-layer wirings in the chipformation portion.

In etching between the wirings 121 and 125 and the dummy patterns 122and 126, an aspect ratio to a height of a wiring material including amask material (for example, a resist film) before the etching is set soas to be 3 or more. When a detection sensitivity of a constriction is tobe increased, the aspect ratio between the wirings 121 and 125 and thedummy patterns 122 and 126 is preferably set so as to be 4.5 or more.

Also in this embodiment, similarly to the first embodiment, theelectrical examination on the monitor pattern is made possible to givean effect that defects such as thinning of the wirings in the chipformation portion and the like can be detected more surely than theconventional case. Then, a result thereof is fed back to manufacturingsteps, and an appropriate manufacturing condition (an etching conditionand the like) is maintained. Thus, a quality of the semiconductor deviceis improved and a manufacturing yield is also improved.

(Fifth Embodiment)

FIG. 16 is a top plan view showing a monitor pattern of a semiconductordevice of a fifth embodiment of the present invention. FIG. 17A is across-section view along I-I line of FIG. 16, and FIG. 17B is across-section view along II-II line of FIG. 16. Note that, in FIGS. 16,17A and 17B, identical constituent components to those of FIGS. 14, 15Aand 15B are denoted by identical reference numerals.

Also in this embodiment, similarly to the fourth embodiment, on thesemiconductor substrate 101, the plurality of lower-layer wirings(resistive elements) 121 on the first interlayer insulation film (notshown) are formed. Moreover, the plurality of upper-layer wirings(resistive elements) 125 are formed on the second interlayer insulationfilm 123. These lower-layer wirings 121 and upper-layer wirings 125 arealternately disposed along the one virtual line 100 turning more thanonce (three times in the drawing). Moreover, in the second interlayerinsulation film 123, the plurality of contact vias 124 are buried, bywhich the lower-layer wirings 121 and the upper-layer wirings 125 areelectrically connected in series.

In the same wiring layer as that of the lower-layer wirings 121, at bothsides of the lower-layer wiring 121 in its width direction, alower-layer dummy pattern 127 a is formed, which extends along an arraydirection of the lower-layer wirings 121. Moreover, in the same wiringlayer as that of the upper-layer wirings 125, an upper-layer dummypattern 127 b is formed along the lower-layer dummy pattern 127 a. Notethat, in a portion where the monitor pattern is folded back at a rightangle, a notch is provided in the upper-layer dummy pattern 127 b, thuspreventing short-circuiting of the upper-layer wirings 125 and theupper-layer dummy pattern 127 b.

In the folded-back portion of the monitor pattern, as shown in FIG. 11,the lower-layer dummy pattern 127 a is preferably disposed so as toextend out of an edge of the lower-layer wiring 121 by a length at least½ or more of a width of the lower-layer wiring 121.

Also in this embodiment, similarly to the fourth embodiment, theelectrical examination on the monitor pattern is made possible to givean effect that defects such as thinning of the wirings in the chipformation portion and the like can be detected more surely than theconventional case.

(Sixth Embodiment)

FIG. 18 is a top plan view showing a monitor pattern of a semiconductordevice of a sixth embodiment of the present invention. FIG. 19A is across-section view along I-I line of FIG. 18, and FIG. 19B is across-section view along II-II line of FIG. 18. Note that, in FIGS. 18,19A and 19B, identical constituent components to those of FIGS. 6, 7Aand 7B are denoted by identical reference numerals.

The plurality of diffused resistors 103, which are formed by introducingimpurities at high concentration into the semiconductor substrate 101,are provided in the semiconductor substrate 101. Moreover, on theinterlayer insulation film 104, the plurality of wirings (resistiveelements) 106 are formed in lines. Furthermore, in the interlayerinsulation film 104, the plurality of contact vias 105 are buried, bywhich the wirings 106 and the diffused resistors 103 are electricallyconnected in series.

Still furthermore, on the interlayer insulation film 104, a plurality ofdummy patterns 128 are formed so as to surround the respective wirings106. These dummy patterns 128 are formed in the same wiring layer asthat of the wirings 106.

Regarding a size of each of the diffused resistors 103, for example, awidth thereof is 0.5 fÊm and a length thereof is 2.5 fÊm. Regarding asize of each of the wirings 106, for example, a width thereof is 0.3 fÊmand a length thereof is 2.5 fÊm. Moreover, the wiring 106 is constitutedby a barrier metal (a Ti film with a thickness of 20 nm+a TiN film witha thickness of 50 nm) and an aluminum film with a thickness of 500 nm,which is formed on the barrier metal. Moreover, each of the dummypatterns 128 has a width of 0.3 fÊm and a space between the dummypattern 128 and the wiring 106 is 0.3 fÊm. Furthermore, a diameter ofeach of the contact vias 105 is 0.3 fÊm.

Also in this embodiment, similarly to the first embodiment, theelectrical examination on the monitor pattern is made possible to givean effect that defects such as thinning of the wirings in the chipformation portion and the like can be detected more surely than theconventional case.

In the case of the monitor pattern of this embodiment, when the numberof the contact vias 105 is assumed to be 100, a length of one side of apad is set to 60 fÊm, the pad requiring a region with a width of 10 fÊmand a length of 60 fÊm in forming the monitor pattern. Thus, the monitorpattern of this embodiment can be formed in the same area as the pad.

FIG. 20 is a top plan view showing a monitor pattern of a modifiedexample of the sixth embodiment. FIG. 21A is a cross-section view on I-Iline of FIG. 20, and FIG. 21B is a cross-section view on II-II line ofFIG. 20.

In the sixth embodiment, the respective wirings 106 are surrounded bythe respective independent dummy patterns 128. However, as shown inFIGS. 20, 21A and 21B, the wirings 106 may be surrounded by a continuousdummy pattern 129. In this case, compared to the monitor pattern shownin FIGS. 18, 19A and 19B, the dummy pattern occupying area can bereduced by about 50%.

(Seventh Embodiment)

FIG. 22 is a top plan view showing a monitor pattern of a semiconductordevice of a seventh embodiment of the present invention. FIG. 23A is across-section view along I-I line of FIG. 22, and FIG. 23B is across-section view along II-II line of FIG. 22. Note that, in FIGS. 22,23A and 23B, identical constituent components to those of FIGS. 14, 15Aand 15B are denoted by identical reference numerals.

On the semiconductor substrate 101, the plurality of lower-layer wirings(resistive elements) 121 on the first interlayer insulation film (notshown) are formed. These lower-layer wirings 121 are covered with thesecond interlayer insulation film 123, and the plurality of upper-layerwirings (resistive elements) 125 are formed on the second interlayerinsulation film 123.

These lower-layer wirings 121 and upper-layer wirings 125 arealternately disposed along a straight line. Moreover, in the secondinterlayer insulation film 123, the plurality of contact vias 124 areburied, by which the lower-layer wirings 121 and the upper-layer wirings125 are electrically connected in series.

In the same wiring layer as that of the lower-layer wirings 121, aplurality of lower-layer dummy patterns 131 are formed so as to surroundthe respective lower-layer wirings 121. Moreover, also in the samewiring layer as that of the upper-layer wirings 125, a plurality ofupper-layer dummy patterns 132 are formed so as to surround therespective upper-layer wirings 125.

The lower-layer wiring 121 and the upper-layer wiring 125 have, forexample, a width of 0.3 fÊm and a length of 1.5 fÊm and are constitutedby a barrier metal with a thickness of 70 nm (Ti film: 20 nm+TiN film:50 nm), an Al film with a thickness of 500 nm and a reflectionpreventing film with a thickness of 78 nm (Ti film: 8 nm+TiN film: 70nm). Moreover, a space between the lower-layer wiring 121 and thelower-layer dummy pattern 131 is 0.3 fÊm, and between the upper-layerwiring 125 and the upper-layer dummy pattern 132 is also 0.3 fÊm.

In such a monitor pattern, constrictions are likely to be generated in aportion below the reflection preventing film of the lower-layer wiring121 and in a portion above the barrier metal of the upper-layer wiring(see FIG. 5). An increase in resistance due to these constrictions iselectrically detected, thus making it possible to identify the presenceof the constrictions and a degree thereof.

FIG. 24 is a top plan view showing a monitor pattern of a modifiedexample of the seventh embodiment. FIG. 25A is a cross-section view onI-I line of FIG. 24, and FIG. 25B is a cross-section view on II-II lineof FIG. 24.

In the seventh embodiment, the lower-layer wirings 121 are surrounded bythe respective independent lower-layer dummy patterns 131 and theupper-layer wirings 125 are surrounded by the respective independentupper-layer dummy patterns 132. However, as shown in FIGS. 24, 25A and25B, the lower-layer wirings 121 may be surrounded by a continuouslower-layer dummy pattern 133 and the upper-layer wirings 125 may besurrounded by a continuous upper-layer dummy pattern 134. Thus, comparedto the monitor pattern shown in FIGS. 22, 23A and 23B, the dummy patternoccupying area can be reduced by about 50%.

(Eighth Embodiment)

FIG. 26 is a top plan view showing a monitor pattern of a semiconductordevice of an eighth embodiment of the present invention. FIG. 27A is across-section view along I-I line of FIG. 26, and FIG. 27B is across-section view along II-II line of FIG. 26. Note that, in FIGS. 26,27A and 27B, identical constituent components to those of FIGS. 6, 7Aand 7B are denoted by identical reference numerals.

Also in this embodiment, the plurality of diffused resistors 103, whichare formed by introducing impurities at high concentration into thesemiconductor substrate 101, are provided in the semiconductor substrate101. Moreover, on the interlayer insulation film 104, the plurality ofwirings (resistive elements) 106 are formed. These diffused resistors103 and wirings 106 are alternately disposed along one virtual line 140turning more than once (twice in the drawing). Moreover, in theinterlayer insulation film 104, the plurality of contact vias 105 areburied, by which the diffused resistors 103 and the wirings 106 areelectrically connected in series.

Furthermore, on the interlayer insulation film 104, a lattice dummypattern 141 is formed, which surrounds the respective wirings 106individually. This dummy pattern 141 is formed in the same wiring layeras that of the wirings 106. Moreover, a space between the dummy pattern141 and each of the wirings 106 is set to, for example, 0.3 fÊm.

Also in this embodiment, similarly to the first embodiment, since thedummy pattern 141 is formed in the vicinity of the wirings 106, thepresence and the degree of the constrictions and the like can bedetected with high sensibility.

(Ninth Embodiment)

FIG. 28 is a top plan view showing a monitor pattern of a semiconductordevice of a ninth embodiment of the present invention. FIG. 29A is across-section view along I-I line of FIG. 28, and FIG. 29B is across-section view along II-II line of FIG. 28. Note that, in FIGS. 28,29A and 29B, identical constituent components to those of FIGS. 14, 15Aand 15B are denoted by identical reference numerals.

On the semiconductor substrate 101, the plurality of lower-layer wirings(resistive elements) 121 on the first interlayer insulation film (notshown) are formed. These lower-layer wirings 121 are covered with thesecond interlayer insulation film 123.

On the second interlayer insulation film 123, the plurality ofupper-layer wirings (resistive elements) 125 are formed. Theselower-layer wirings 121 and upper-layer wirings 125 are alternatelydisposed along the one virtual line 140 turning more than once (twice inthe drawing). Moreover, in the second interlayer insulation film 123,the plurality of contact vias 124 are buried, by which the lower-layerwirings 121 and the upper-layer wirings 125 are electrically connectedin series.

In the same wiring layer as that of the lower-layer wirings 121, alattice lower-layer dummy pattern 142 is formed, which surrounds therespective lower-layer wirings 121 individually. Moreover, in the samewiring layer as that of the upper-layer wirings 125, a latticeupper-layer dummy pattern 143 is formed, which surrounds the respectiveupper-layer wirings 125 individually. Note that the upper-layer wirings125 positioned at ends of the monitor pattern extend out of theupper-layer dummy pattern 143 through notched portions of theupper-layer dummy pattern 143.

Also in this embodiment, a space between the lower-layer wirings 121 andthe lower-layer dummy pattern 142 and a space between the upper-layerwirings 125 and the upper-layer dummy pattern 143 are set, for example,in accordance with the minimum space between the wirings in the chipformation portion. Thus, an effect similar to that of the fourthembodiment can be obtained.

(Tenth Embodiment)

FIG. 30 is a top plan view showing a monitor pattern of a semiconductordevice of a tenth embodiment of the present invention. FIG. 31A is across-section view along I-I line of FIG. 30, and FIG. 31B is across-section view along II-II line of FIG. 30. Note that, in FIGS. 30,31A and 31B, identical constituent components to those of FIGS. 6, 7Aand 7B are denoted by identical reference numerals.

Also in this embodiment, the plurality of diffused resistors 103, whichare formed by introducing impurities at high concentration into thesemiconductor substrate 101, are provided in the semiconductor substrate101. Moreover, on the interlayer insulation film 104, the plurality ofwirings (resistive elements) 106 are formed. These diffused resistors103 and wirings 106 are alternately disposed along the one virtual line140 turning more than once (twice in the drawing). Moreover, in theinterlayer insulation film 104, the plurality of contact vias 105 areburied, by which the wirings 106 and the diffused resistors 103 areelectrically connected in series.

Furthermore, on the interlayer insulation film 104, a lattice dummypattern 145 is formed, which surrounds the respective wirings 106individually. This dummy pattern 145 is formed in the same wiring layeras that of the wirings 106.

Also in this embodiment, a space between the wirings 106 and the dummypattern 145 is set, for example, in accordance with the minimum spacebetween the wirings in the chip formation portion. Thus, an effectsimilar to that of the first embodiment can be obtained.

(Eleventh Embodiment)

FIG. 32 is a top plan view showing a monitor pattern of a semiconductordevice of an eleventh embodiment of the present invention. FIG. 33A is across-section view along I-I line of FIG. 32, and FIG. 33B is across-section view along II-II line of FIG. 32. Note that, in FIGS. 32,33A and 33B, identical constituent components to those of FIGS. 14, 15Aand 15B are denoted by identical reference numerals.

On the semiconductor substrate 101, the plurality of lower-layer wirings(resistive elements) 121 on the first interlayer insulation film (notshown) are formed. These lower-layer wirings 121 are covered with thesecond interlayer insulation film 123, and on the second interlayerinsulation film 123, the plurality of upper-layer wirings (resistiveelements) 125 are formed.

These lower-layer wirings 121 and upper-layer wirings 125 arealternately disposed along one virtual line 140 turning more than once(twice in the drawing). Moreover, in the second interlayer insulationfilm 123, the plurality of contact vias 124 are buried, by which thelower-layer wirings 121 and the upper-layer wirings 125 are electricallyconnected in series.

In the same wiring layer as that of the lower-layer wirings 121, alattice lower-layer dummy pattern 146 is formed, which surrounds therespective lower-layer wirings 121 individually. Moreover, in the samewiring layer as that of the upper-layer wirings 125, a latticeupper-layer dummy pattern 147 is formed, which surrounds the respectiveupper-layer wirings 125 individually.

Also in this embodiment, a space between the lower-layer wirings 121 andthe lower-layer dummy pattern 146 and a space between the upper-layerwirings 125 and the upper-layer dummy pattern 147 are set, for example,in accordance with the minimum space between the wirings in the chipformation portion. Thus, an effect similar to that of the fourthembodiment can be obtained.

(Twelfth Embodiment)

FIG. 34 is a top plan view showing a monitor pattern of a semiconductordevice of a twelfth embodiment of the present invention. FIG. 35A is across-section view along I-I line of FIG. 34, and FIG. 35B is across-section view along II-II line of FIG. 34. Note that, in FIGS. 34,35A and 35B, identical constituent components to those of FIGS. 6, 7Aand 7B are denoted by identical reference numerals.

The plurality of diffused resistors 103, which are formed by introducingimpurities at high concentration into the semiconductor substrate 101,are provided in the semiconductor substrate 101. Moreover, on theinterlayer insulation film 104, the plurality of wirings (resistiveelements) 106 are formed. These diffused resistors 103 and wirings 106are alternately disposed along a zigzag virtual line 150. Specifically,the wirings 106 are disposed aligning its longitudinal direction with ahorizontal direction, and the diffused resistors 103 are disposedaligning its longitudinal direction with a vertical direction. Moreover,in the second interlayer insulation film 104, the plurality of contactvias 105 are buried, by which the wirings 106 and the diffused resistors103 are electrically connected in series.

Furthermore, on the interlayer insulation film 104, a lattice dummypattern 151 is formed, which surrounds the respective wirings 106individually.

Also in this embodiment, a space between the lower-layer wirings 121 anda lower-layer dummy pattern 152 and a space between the upper-layerwirings 125 and an upper-layer dummy pattern 153 are set, for example,in accordance with the minimum space between the wirings in the chipformation portion. Thus, an effect similar to that of the firstembodiment can be obtained.

(Thirteenth Embodiment)

FIG. 36 is a top plan view showing a monitor pattern of a semiconductordevice of a thirteenth embodiment of the present invention. FIG. 37A isa cross-section view along I-I line of FIG. 36, and FIG. 37B is across-section view along II-II line of FIG. 36. Note that, in FIGS. 36,37A and 37B, identical constituent components to those of FIGS. 14, 15Aand 15B are denoted by identical reference numerals.

On the semiconductor substrate 101, the plurality of lower-layer wirings(resistive elements) 121 on the first interlayer insulation film (notshown) are formed. Moreover, on the second interlayer insulation film123, the plurality of upper-layer wirings (resistive elements) 125 areformed. These lower-layer wirings 121 and the upper-layer wirings 125are alternately disposed along the zigzag virtual line 150.Specifically, the upper-layer wirings 125 are disposed aligning itslongitudinal direction with a horizontal direction, and the lower-layerwirings 121 are disposed aligning its longitudinal direction with avertical direction.

Moreover, in the second interlayer insulation film 123, the plurality ofcontact vias 124 are buried, by which the lower-layer wirings 121 andthe upper-layer wirings 125 are electrically connected in series.

In the same wiring layer as that of the lower-layer wirings 121, alattice lower-layer dummy pattern 152 is formed, which surrounds therespective lower-layer wirings 121 individually. Moreover, in the samewiring layer as that of the upper-layer wirings 125, a latticeupper-layer dummy pattern 153 is formed, which surrounds the respectiveupper-layer wirings 125 individually.

Also in this embodiment, a space between the lower-layer wirings 121 andthe lower-layer dummy pattern 152 and a space between the upper-layerwirings 125 and the upper-layer dummy pattern 153 are set, for example,in accordance with the minimum space between the wirings in the chipformation portion. Thus, an effect similar to that of the fourthembodiment can be obtained.

(Fourteenth Embodiment)

FIG. 38 is a top plan view showing a monitor pattern of a semiconductordevice of a fourteenth embodiment of the present invention. FIG. 39A isa cross-section view along I-I line of FIG. 38, and FIG. 39B is across-section view along II-II line of FIG. 38. Note that, in FIGS. 38,39A and 39B, identical constituent components to those of FIGS. 6, 7Aand 7B are denoted by identical reference numerals.

The plurality of diffused resistors 103, which are formed by introducingimpurities at high concentration into the semiconductor substrate 101,are provided in the semiconductor substrate 101. Moreover, on theinterlayer insulation film 104, the plurality of wirings (resistiveelements) 106 are formed. These diffused resistors 103 and wirings 106are alternately disposed along one virtual line 160 having a number offlections. Moreover, in the interlayer insulation film 104, theplurality of contact vias 105 are buried, by which the wirings 106 andthe diffused resistors 103 are electrically connected in series.

Furthermore, in the same wiring layer as that of the wirings 106, alattice dummy pattern 161 is formed, which surrounds the respectivewirings 106 individually.

Also in this embodiment, a space between the wirings 106 and the dummypattern 161 is set, for example, in accordance with the minimum spacebetween the wirings in the chip formation portion. Thus, an effectsimilar to that of the first embodiment can be obtained. Moreover, inthis embodiment, a change in a resistance value due to positionalchanges of the diffused resistors 103 and the wirings 106 in thehorizontal and vertical directions can be detected.

(Fifteenth Embodiment)

FIG. 40 is a top plan view showing a monitor pattern of a semiconductordevice of a fifteenth embodiment of the present invention. FIG. 41A is across-section view along I-I line of FIG. 40, and FIG. 41B is across-section view along II-II line of FIG. 40. Note that, in FIGS. 40,41A and 41B, identical constituent components to those of FIGS. 14, 15Aand 15B are denoted by identical reference numerals.

On the semiconductor substrate 101, the plurality of lower-layer wirings(resistive elements) 121 on the first interlayer insulation film (notshown) are formed. These lower-layer wirings 121 are covered with thesecond interlayer insulation film 123, and on the second interlayerinsulation film 123, the plurality of upper-layer wirings (resistiveelements) 125 are formed.

These lower-layer wirings 121 and upper-layer wirings 125 arealternately disposed along the one virtual line 160 having a number offlections. Moreover, in the second interlayer insulation film 123, theplurality of contact vias 124 are buried, by which the lower-layerwirings 121 and the upper-layer wirings 125 are electrically connectedin series.

In the same wiring layer as that of the lower-layer wirings 121, alattice lower-layer dummy pattern 162 is formed, which surrounds therespective lower-layer wirings 121 individually. Moreover, in the samewiring layer as that of the upper-layer wirings 125, a latticeupper-layer dummy pattern 163 is formed, which surrounds the respectiveupper-layer wirings 125 individually. Note that the upper-layer wirings125 positioned at ends of the monitor pattern extend out of theupper-layer dummy pattern 163 through notched portions of theupper-layer dummy pattern 163.

Also in this embodiment, a space between the lower-layer wirings 121 andthe lower-layer dummy pattern 162 and a space between the upper-layerwirings 125 and the upper-layer dummy pattern 163 are set, for example,in accordance with the minimum space between the wirings in the chipformation portion. Thus, an effect similar to that of the fourthembodiment can be obtained. Moreover, in this embodiment, a change in aresistance value due to positional changes of the lower-layer wirings121 and the upper-layer wirings 125 in the horizontal and verticaldirections can be detected.

(Sixteenth Embodiment)

FIG. 42 is a top plan view showing a monitor pattern of a semiconductordevice of a sixteenth embodiment of the present invention. FIG. 43A is across-section view along I-I line of FIG. 42, and FIG. 43B is across-section view along II-II line of FIG. 42. Note that, in FIGS. 42,43A and 43B, identical constituent components to those of FIGS. 6, 7Aand 7B are denoted by identical reference numerals.

The plurality of diffused resistors 103, which are formed by introducingimpurities at high concentration into the semiconductor substrate 101,are provided in the semiconductor substrate 101. Moreover, on theinterlayer insulation film 104, the plurality of wirings (resistiveelements) 106 are formed. These diffused resistors 103 and wirings 106are alternately disposed along one virtual line 170 having a number offlections. Moreover, in the interlayer insulation film 104, theplurality of contact vias 105 are buried, by which the wirings 106 andthe diffused resistors 103 are electrically connected in series.

Furthermore, in the same wiring layer as that of the wirings 106, alattice dummy pattern 171 is formed, which surrounds the respectivewirings 106 individually.

Also in this embodiment, a space between the wirings 106 and the dummypattern 171 is set, for example, in accordance with the minimum spacebetween the wirings in the chip formation portion. Thus, an effectsimilar to that of the first embodiment can be obtained.

(Seventeenth Embodiment)

FIG. 44 is a top plan view showing a monitor pattern of a semiconductordevice of a seventeenth embodiment of the present invention. FIG. 45A isa cross-section view along I-I line of FIG. 44, and FIG. 45B is across-section view along II-II line of FIG. 44. Note that, in FIGS. 44,45A and 45B, identical constituent components to those of FIGS. 14, 15Aand 15B are denoted by identical reference numerals.

On the semiconductor substrate 101, the plurality of lower-layer wirings(resistive elements) 121 on the first interlayer insulation film (notshown) are formed. These lower-layer wirings 121 are covered with thesecond interlayer insulation film 123, and on the second interlayerinsulation film 123, the plurality of upper-layer wirings (resistiveelements) 125 are formed.

These lower-layer wirings 121 and upper-layer wirings 125 arealternately disposed along one virtual line 180 having a number offlections. Moreover, in the second interlayer insulation film 123, thecontact vias 124 are buried, by which the lower-layer wirings 121 andthe upper-layer wirings 125 are electrically connected in series.

In the same wiring layer as that of the lower-layer wirings 121, alattice lower-layer dummy pattern 181 is formed, which surrounds therespective lower-layer wirings 121 individually. Moreover, also in thesame wiring layer as that of the upper-layer wirings 125, a latticeupper-layer dummy pattern 182 is formed, which surrounds the respectiveupper-layer wirings 125 individually. Note that the upper-layer wirings125 positioned at ends of the monitor pattern extend out of theupper-layer dummy pattern 182 through notched portions of theupper-layer dummy pattern 182.

Also in this embodiment, a space between the lower-layer wirings 121 andthe lower-layer dummy pattern 181 and a space between the upper-layerwirings 125 and the upper-layer dummy pattern 182 are set, for example,in accordance with the minimum space between the wirings in the chipformation portion. Thus, an effect similar to that of the fourthembodiment can be obtained.

(Eighteenth Embodiment)

Hereinafter, description will be made for an eighteenth embodiment ofthe present invention.

In all of the above-described first to seventeenth embodiments,described is the monitor pattern for detecting the abnormality causedmainly by the constrictions. As shown in a graph of FIG. 46, aresistance value of a monitor pattern having contact vias is influencedby both a positional change of the contact vias and a constriction of awiring (a resistive element). When there is neither any constriction norany positional change of the contact vias, the resistance of the contacthas the lowest value. When the positional change occurs, the resistancevalue changes in accordance with a contact area between the wiring andthe contact vias. When the constriction is generated, the resistancevalue increases as a whole.

In either of the first to seventeenth embodiments, it is impossible todetermine whether the increase in the resistance value is caused by theconstriction or by the positional change of the contact vias. Thus, inthis embodiment, three kinds of monitor patterns, that is, first tothird monitor patterns are formed on one semiconductor substrate(wafer), and a cause of abnormality is identified based on resistancevalues of the respective monitor patterns.

FIG. 47 is a top plan view showing one cell of a first monitor pattern,FIG. 48A is a cross-section view along I-I line of FIG. 47 and FIG. 48Bis a cross-section view along II-II line of FIG. 47. Moreover, FIG. 49is a top plan view showing one cell of a second monitor pattern, FIG.50A is a cross-section view along I-I line of FIG. 49 and FIG. 50B is across-section view along II-II line of FIG. 49. Furthermore, FIG. 51 isa top plan view showing one cell of a third monitor pattern, FIG. 52A isa cross-section view along I-I line of FIG. 51 and FIG. 52B is across-section view along II-II line of FIG. 51. Note that illustrationof upper-layer wirings is omitted in any of the above drawings.

A first monitor pattern 211 shown in FIGS. 47, 48A and 48B is a patternfor detecting positional changes of contact vias 204 (positional changesin up and down directions of FIG. 47). This first monitor pattern 211 isconstituted by: a plurality of lower-layer wirings (resistive elements)202 on a first interlayer insulation film (not shown) formed above asemiconductor substrate 201; dummy patterns surrounding the respectivelower-layer wirings 202 independently; upper-layer wirings formed on asecond interlayer insulation film covering these lower-layer wirings 202and dummy patterns 203; and the contact vias 204 connecting thelower-layer wirings 202 and the upper-layer wirings.

Similarly to the fourth embodiment (see FIG. 14), the lower-layerwirings 202 and the upper-layer wirings are formed alternately along thevirtual line. The contact vias 204 are disposed at positions inward by aspecific distance from ends of the wiring 202 in its longitudinaldirection, that is, at positions shifted toward an upper side of thepage space of FIG. 49 in a width direction of the lower-layer wiring 202by, for example, a half of the width of the lower-layer wiring 202.Therefore, when the contact vias 204 are shifted in the up and downdirections of FIG. 47, a contact resistance changes, and when thecontact vias 204 are shifted in right and left directions of FIG. 47,the contact resistance does not change.

A second monitor pattern 212 shown in FIGS. 49, 50A and 50B is a patternfor detecting effects of both the positional changes of the contact vias204 and constrictions. In this second monitor pattern 212, the contactvias 204 are disposed at the both ends of the lower-layer wiring 202 inits longitudinal direction, that is, at positions shifted in the widthdirection of the lower-layer wiring 202 by, for example, a half of thewidth of the lower-layer wiring 202. The ends of the lower-layer wiring202 are places where the constrictions are likely to be generated.Therefore, in the second monitor pattern 212, occurrence of at least anyof the constrictions and the positional changes of the contact vias 204increases the contact resistance.

A third monitor pattern 213 shown in FIGS. 51, 52A and 52B is a patternfor detecting constrictions. In this third monitor pattern 213, thecontact vias 204 are disposed at positions aligned with the both ends ofthe lower-layer wiring 202 in its longitudinal direction.

In this embodiment, a width of the lower-layer wiring 202 of the firstmonitor pattern 211 is 0.3 fÊm and a length thereof is 1.8 fÊm.Moreover, the contact vias 204 are disposed at positions apart from theboth ends of the lower-layer wiring 202 by 0.15 fÊm and shifted in thewidth direction of the lower-layer wiring 202 by 0.15 fÊm.

A width of the lower-layer wiring 202 of the second monitor pattern 212is 0.3 fÊm and a length thereof is 1.5 fÊm. Moreover, the contact vias204 are disposed at positions shifted in the width direction of thelower-layer wiring 202 by 0.15 fÊm. A width of the lower-layer wiring202 of the third monitor pattern 213 is 0.3 fÊm and a length thereof is1.8 fÊm.

A width of each of the dummy patterns 203 is 0.3 fÊm and a space betweenthe dummy pattern 203 and the lower-layer wiring 202 is 0.3 fÊm.

In this embodiment, 50 of the lower-layer wirings 202 of the firstmonitor pattern 211 and 51 of the upper-layer wirings thereof arealternately connected to each other by use of 100 of the contact vias204. Similarly to the above, 50 of the lower-layer wirings 202 of thesecond monitor pattern 212 and 51 of the upper-layer wirings thereof arealternately connected to each other by use of 100 of the contact vias204, and 50 of the lower-layer wirings 202 of the third monitor pattern213 and 51 of the upper-layer wirings thereof are alternately connectedto each other by use of 100 of the contact vias 204.

In this case, assuming that a resistance value of the third monitorpattern 213 when there is no positional change or constriction is 0.23f¶, resistance values of the first and second monitor patterns 211 and212 are 0.3 f¶.

For example, when the positions of the contact vias 204 are shifted inthe longitudinal direction of the lower-layer wiring 202 (note that anamount of the positional change is 0.15 fÊm or less), the resistancevalue of the first monitor pattern 211 does not change, the resistancevalue of the second monitor pattern 212 increases by, for example, about0.39 f¶, and the resistance value of the third monitor pattern 213increases by about 0.3 f¶.

When the positions of the contact vias 204 are shifted in the widthdirection of the lower-layer wiring 202, the resistance values of thefirst to third monitor patterns 211, 212 and 213 change, respectively,in accordance with the amount of the positional changes.

Moreover, the resistance values of the second and third monitor patterns212 and 213 increase in response to the generated constrictions. Forexample, the resistance value of the second monitor pattern 212 becomes440 f¶, and the resistance value of the third monitor pattern 213becomes 360 f¶. In the first monitor pattern 211, the contact vias 204are disposed at the positions apart from the ends of the wiring 202.Thus, even when the constrictions are generated in the second and thirdmonitor patterns 212 and 213, generation of the constrictions is avoidedin the first monitor pattern 211.

Therefore, when the examination device detects abnormality of theresistance values, it is possible to infer from the resistance values ofthe first to third monitor patterns 211, 212 and 213 that theabnormality results from the positional changes of the contact vias orfrom the generation of the constrictions.

(Nineteenth Embodiment)

FIG. 53 is a plan view showing one cell of a monitor pattern 214 of asemiconductor device of a nineteenth embodiment of the presentinvention, FIG. 54A is a cross-section view along I-I line of FIG. 53,FIG. 54B is a cross-section view along II-II line of FIG. 53 and FIG.54C is a cross-section view along III-III line of FIG. 53. Note that themonitor pattern shown in FIGS. 53, 54A, 54B and 54C corresponds to thesecond monitor pattern described in the eighteenth embodiment (see FIGS.49, 50A and 50B). On the semiconductor substrate 201, the first andthird monitor patterns described in the eighteenth embodiment are alsoformed.

In this embodiment, the contact via 204 at one end of the lower-layerwiring 202 is disposed at a position shifted toward an upper side of thepage space of FIG. 53 by a half of the width of the lower-layer wiring202. Moreover, the contact via 204 at the other end of the lower-layerwiring 202 is disposed at a position shifted toward a lower side of thepage space of FIG. 53 by a half of the width of the lower-layer wiring202.

In this embodiment, the positional changes of the contact vias 204 notonly in the up and down directions but also in a rotating direction (adirection indicated by arrows in FIG. 53) can be detected.

(Twentieth Embodiment)

FIG. 55 is a plan view showing one cell of a monitor pattern of asemiconductor device of a twentieth embodiment of the present invention,FIG. 56A is a cross-section view along I-I line of FIG. 55, FIG. 56B isa cross-section view along II-II line of FIG. 55 and FIG. 56C is across-section view along III-III line of FIG. 55. Note that the monitorpattern 215 shown in FIGS. 55, 56A, 56B and 56C corresponds to the firstmonitor pattern described in the eighteenth embodiment (see FIGS. 47,48A and 48B). On the semiconductor substrate 201, the second and thirdmonitor patterns described in the eighteenth embodiment are also formed.

In this embodiment, the contact via 204 at one end of the lower-layerwiring 202 is disposed at a position apart from the one end of thewiring 202 by a specific distance, that is, at a position shifted towardan upper side of the page space of FIG. 55 by a half of the width of thelower-layer wiring 202. Moreover, the contact via 204 at the other endof the lower-layer wiring 202 is disposed at a position apart from theother end of the wiring 202 by a specific distance, that is, at aposition shifted toward a lower side of the page space of FIG. 55 by ahalf of the width of the lower-layer wiring 202.

Also in this embodiment, the positional changes of the contact vias 204not only in the up and down directions but also in a rotating direction(a direction indicated by arrows in FIG. 55) can be detected.

(Twenty-First Embodiment)

Hereinafter, description will be made for a twenty-first embodiment ofthe present invention. Also in this embodiment, three kinds of monitorpatterns, that is, first to third monitor patterns are formed on asemiconductor substrate.

FIG. 57 is a top plan view showing a first monitor pattern 231 of asemiconductor device of the twenty-first embodiment of the presentinvention, FIG. 58A is a cross-section view along I-I line of FIG. 57,FIG. 58B is a cross-section view along II-II line of FIG. 57.

The semiconductor substrate 201 is separated into a plurality of elementregions by an element separation film 222. In the element regions, aplurality of diffused resistors 223 are provided, which are formed byintroducing impurities at high concentration into the semiconductorsubstrate 201. Moreover, on the semiconductor substrate 201, aninterlayer insulation film 224 is formed. On this interlayer insulationfilm 224, a plurality of wirings (resistive elements) 226 are formed.

These diffused resistors 223 and wirings 226 are alternately disposedalong a straight line. Moreover, in the interlayer insulation film 224,a plurality of contact vias 225 are buried, by which the wirings 226 andthe diffused resistors 223 are electrically connected in series.

Furthermore, on the interlayer insulation film 224, a lattice dummypattern 227 is formed, which surrounds the respective wirings 226independently. This dummy pattern 227 is formed in the same wiring layeras that of the wirings 226.

In the first monitor pattern 231, the contact vias 225 are disposed atpositions inward from ends in a longitudinal direction of the wiring 226by a specific distance, that is, at positions shifted toward an upperside of the page space of FIG. 57 in a width direction of the wiring 226by a half of the width of the wiring 226.

This first monitor pattern 231 is a pattern for detecting positionalchanges of the contact vias 225 (positional changes in up and downdirections of FIG. 57).

FIG. 59 is a top plan view showing a second monitor pattern 232 of thisembodiment, FIG. 60A is a cross-section view along I-I line of FIG. 59,FIG. 60B is a cross-section view along II-II line of FIG. 59.

The second monitor pattern 232 is also constituted by the diffusedresistors 223, the wirings (resistive elements) 226, the contact vias225 and the dummy pattern 227. The contact vias 225 are disposed at theboth ends in the longitudinal direction of the wiring 226, that is, atpositions shifted in the width direction of the wiring 226 by a half ofthe width of the wiring 226.

This second monitor pattern 232 is a pattern for detecting effects ofboth the positional changes of the contact vias 225 and constrictions.

FIG. 61 is a top plan view showing a third monitor pattern 233 of thisembodiment, FIG. 62A is a cross-section view along I-I line of FIG. 61,FIG. 62B is a cross-section view along II-II line of FIG. 61.

The third monitor pattern 233 is also constituted by the diffusedresistors 223, the wirings (resistive elements) 226, the contact vias225 and the dummy pattern 227. The contact vias 225 are disposed atpositions aligned with the both ends in the longitudinal direction ofthe wiring 226. This third monitor pattern 233 is a pattern fordetecting constrictions.

In the above first to third monitor patterns 231 to 233, the diffusedresistors 223 are formed simultaneously with, for example, an impuritydiffusion layer to be source/drain of a transistor. Moreover, thecontact vias 225 are formed simultaneously with contact vias in anelement formation portion, and the wirings 226 and dummy pattern 227 areformed simultaneously with wirings in the element formation portion.Furthermore, a space between the wirings 226 and the dummy pattern 227is set in accordance with, for example, a minimum space between wiringsin a chip formation portion.

Also in this embodiment, when the examination device detects abnormalityin resistance values, it is possible to infer from resistance values ofthese first to third monitor patterns 231, 232 and 233 that theabnormality results from the positional changes of the contact vias orfrom the generation of the constrictions.

(Twenty-Second Embodiment)

Hereinafter, description will be made for a twenty-second embodiment ofthe present invention. Also in this embodiment, three kinds of monitorpatterns, that is, first to third monitor patterns are formed on asemiconductor substrate.

FIG. 63 is a top plan view showing a first monitor pattern 251 of asemiconductor device of the twenty-second embodiment of the presentinvention, FIG. 64A is a cross-section view along I-I line of FIG. 63,FIG. 64B is a cross-section view along II-II line of FIG. 63.

On the semiconductor substrate 201, a plurality of lower-layer wirings(resistive elements) 241 on a first interlayer insulation film (notshown) are formed. These lower-layer wirings 241 are covered with asecond interlayer insulation film 243, and on the second interlayerinsulation film 243, a plurality of upper-layer wirings (resistiveelements) 245 are formed.

These lower-layer and upper-layer wirings 241 and 245 are disposedalternately along a virtual line. Moreover, in the second interlayerinsulation film 243, a plurality of contact vias 244 are buried, bywhich the lower-layer wirings 241 and the upper-layer wirings 245 areelectrically connected in series. Note that, in the first monitorpattern 251, the contact vias 244 are disposed, as shown in FIG. 63, atpositions shifted toward the lower-layer wiring 241 from an overlappingportion of the lower-layer and upper-layer wirings 241 and 245 by a halfof a width of the lower-layer wiring 241, that is, at positions shiftedtoward an upper side of the page space of FIG. 63 by a half of the widthof the lower-layer wiring 241.

In the same wiring layer as that of the lower-layer wirings 241, alattice lower-layer dummy pattern 242 is formed, which surrounds therespective lower-layer wirings 241 independently. Moreover, also in thesame wiring layer as that of the upper-layer wirings 245, a latticeupper-layer dummy pattern 246 is formed, which surrounds the respectiveupper-layer wirings 245 independently.

This first monitor pattern 251 is a pattern for detecting positionalchanges of the contact vias 244.

FIG. 65 is a top plan view showing a second monitor pattern 252 of thesemiconductor device of this embodiment, FIG. 66A is a cross-sectionview along I-I line of FIG. 65, FIG. 66B is a cross-section view alongII-II line of FIG. 65.

The second monitor pattern 252 is also constituted by the lower-layerwirings 241, the upper-layer wirings 245, the contact vias 244, thelower-layer dummy pattern 242 and the upper-layer dummy pattern 246. Thecontact vias 244 are disposed at the both ends of the lower-layer wiring241, that is, at positions shifted toward an upper side of the pagespace of FIG. 65 by a half of the width of the lower-layer wiring 241.

This second monitor pattern 252 is a pattern for detecting effects ofboth the positional changes of the contact vias 244 and constrictions.

FIG. 67 is a top plan view showing a third monitor pattern 253 of thesemiconductor device of this embodiment, FIG. 68A is a cross-sectionview along I-I line of FIG. 67, FIG. 68B is a cross-section view alongII-II line of FIG. 67.

The third monitor pattern 253 is also constituted by the lower-layerwirings 241, the upper-layer wirings 245, the contact vias 244, thelower-layer dummy pattern 242 and the upper-layer dummy pattern 246. Thecontact vias 244 are disposed at positions aligned with the both ends ofthe lower-layer wiring 241. This third monitor pattern 253 is a patternfor detecting constrictions.

In the above first to third monitor patterns 251 to 253, the lower-layerwirings 241 and the lower-layer dummy pattern 242 are formedsimultaneously with lower-layer wirings of the chip formation portion,the contact vias 244 are formed simultaneously with contact vias of thechip formation portion, and the upper-layer wirings 245 and theupper-layer dummy pattern 246 are formed simultaneously with upper-layerwirings of the chip formation portion.

Also in this embodiment, when the examination device detects abnormalityin resistance values, it is possible to infer from resistance values ofthese first to third monitor patterns 251, 252 and 253 that theabnormality results from the positional changes of the contact vias orfrom the generation of the constrictions.

(Twenty-Third Embodiment)

Hereinafter, description will be made for a twenty-third embodiment ofthe present invention. Also in this embodiment, three kinds of monitorpatterns, that is, first to third monitor patterns are formed on asemiconductor substrate.

FIG. 69 is a top plan view showing a first monitor pattern 261 of asemiconductor device of the twenty-third embodiment of the presentinvention, FIG. 70A is a cross-section view along I-I line of FIG. 69,FIG. 70B is a cross-section view along II-II line of FIG. 69 and FIG.70C is a cross-section view along III-III line of FIG. 69. Note thatidentical constituent components to those of FIGS. 57, 58A and 58B aredenoted by identical reference numerals.

A first monitor pattern 261 is constituted by: the diffused resistors223 formed in the semiconductor substrate 201; the wirings (resistiveelements) 226 formed on the semiconductor substrate 201; the contactvias 225 buried in the interlayer insulation film 224; and the latticedummy pattern 227 surrounding the respective wirings 226 independently.

The contact via 225 at one end of the wiring 226 is disposed at aposition away inward from the one end of the wiring 226 by a specificdistance, that is, at a position shifted toward an upper side of thepage space of FIG. 69 by a half of the width of the wiring 226.Moreover, the contact via 225 at the other end of the wiring 226 isdisposed at a position away inward from the other end of the wiring 226by a specific distance, that is, at a position shifted toward a lowerside of the page space of FIG. 69 by a half of the width of the wiring226.

FIG. 71 is a top plan view showing a second monitor pattern 262, FIG.72A is a cross-section view along I-I line of FIG. 71, FIG. 72B is across-section view along II-II line of FIG. 71, and FIG. 72C is across-section view along III-III line of FIG. 71.

The second monitor pattern 262 is also constituted by the diffusedresistors 223, the wirings 226, the contact vias 225 and the dummypattern 227.

The contact via 225 at one end of the wiring 226 is disposed at aposition shifted toward an upper side of the page space of FIG. 71 by ahalf of the width of the wiring 226. Moreover, the contact via 225 atthe other end of the wiring 226 is disposed at a position shifted towarda lower side of the page space of FIG. 71 by a half of the width of thewiring 226.

A third monitor pattern is identical to the one shown in FIGS. 61, 62Aand 62B, and thus description thereof will be omitted herein.

In this embodiment, in addition to an effect similar to that of thetwenty-first embodiment, an effect of detecting positional changes ofthe contact vias in the rotating direction can be obtained.

(Twenty-Fourth Embodiment)

Hereinafter, description will be made for a twenty-fourth embodiment ofthe present invention. Also in this embodiment, three kinds of monitorpatterns, that is, first to third monitor patterns are formed on asemiconductor substrate.

FIG. 73 is a top plan view showing a first monitor pattern 271 of asemiconductor device of the twenty-fourth embodiment of the presentinvention, FIG. 74A is a cross-section view along I-I line of FIG. 73,FIG. 74B is a cross-section view along II-II line of FIG. 73 and FIG.74C is a cross-section view along III-III line of FIG. 73. Note thatidentical constituent components to those of FIGS. 63, 64A and 64B aredenoted by identical reference numerals.

A first monitor pattern 271 is constituted by: the lower-layer wirings(resistive elements) 241 formed on the semiconductor substrate 201; theupper-layer wirings (resistive elements) 245 formed on the interlayerinsulation film 243; the contact vias 244 buried in the interlayerinsulation film 243; the lattice lower-layer dummy pattern 242 which isformed in the same wiring layer as that of the lower-layer wirings 241and surrounds the respective lower-layer wirings 241 independently; andthe lattice upper-layer dummy pattern 246 which is formed in the samewiring layer as that of the upper-layer wirings 245 and surrounds therespective upper-layer wirings 245 independently.

The contact via 244 at one end of the lower-layer wiring 241 is disposedat a position away inward from the one end of the lower-layer wiring 241by a specific distance, that is, at a position shifted toward an upperside of the page space of FIG. 73 by a half of the width of thelower-layer wiring 241. Moreover, the contact via 244 at the other endof the lower-layer wiring 241 is disposed at a position away inward fromthe other end of the lower-layer wiring 241 by a specific distance, thatis, at a position shifted toward a lower side of the page space of FIG.73 by a half of the width of the lower-layer wiring 241.

FIG. 75 is a top plan view showing a second monitor pattern 272, FIG.76A is a cross-section view along I-I line of FIG. 75, FIG. 76B is across-section view along II-II line of FIG. 75 and FIG. 76C is across-section view along III-III line of FIG. 75.

The second monitor pattern 272 is also constituted by the lower-layerwirings 241, the upper-layer wirings 245, the contact vias 244, thelower-layer dummy pattern 242 and the upper-layer dummy pattern 246.

The contact via 244 at one end of the lower-layer wiring 241 is disposedat a position shifted toward an upper side of the page space of FIG. 75by a half of the width of the lower-layer wiring 241. Moreover, thecontact via 244 at the other end of the lower-layer wiring 241 isdisposed at a position shifted toward a lower side of the page space ofFIG. 75 by a half of the width of the lower-layer wiring 241.

A third monitor pattern is identical to the one shown in FIGS. 67, 68Aand 68B, and thus description thereof will be omitted herein.

In this embodiment, in addition to an effect similar to that of thetwenty-second embodiment, an effect of detecting positional changes ofthe contact vias in the rotating direction can be obtained.

(Twenty-Fifth Embodiment)

FIG. 77 is a top plan view showing a monitor pattern of a semiconductordevice of a twenty-fifth embodiment of the present invention, FIG. 78Ais a cross-section view along I-I line of FIG. 77 and FIG. 78B is across-section view along II-II line of FIG. 77.

In this embodiment, one monitor pattern is constituted by combining thecells of the first to third monitor patterns 231 to 233 shown in FIGS.57 to 62. Specifically, a semiconductor substrate 301 is separated intoa plurality of element regions by an element separation film 302. In theelement regions, a plurality of diffused resistors 303 are provided,which are formed by introducing impurities at high concentration intothe semiconductor substrate 301. Moreover, on the semiconductorsubstrate 301, an interlayer insulation film 304 is formed. On thisinterlayer insulation film 304, a plurality of wirings 306 are formed.

These diffused resistors 303 and wirings 306 are alternately disposedalong one virtual line 300 having a number of flections. Moreover, inthe interlayer insulation film 304, a plurality of contact vias 305 areburied, by which the wirings 306 and the diffused resistors 303 areelectrically connected in series. Note that, in this embodiment, onemonitor pattern is obtained by combining the first to third monitorpatterns 231 to 233 described in the twenty-first embodiment.

(Twenty-Sixth Embodiment)

FIG. 79 is a top plan view showing a monitor pattern of a semiconductordevice of a twenty-sixth embodiment of the present invention, FIG. 80Ais a cross-section view along I-I line of FIG. 79 and FIG. 80B is across-section view along II-II line of FIG. 79.

In this embodiment, one monitor pattern is constituted by combining thecells of the first to third monitor patterns 251 to 253 shown in FIGS.63 to 68. Specifically, on a semiconductor substrate 401, a plurality oflower-layer wirings (resistive elements) 421 on a first interlayerinsulation film (not shown) are formed. These lower-layer wirings 421are covered with a second interlayer insulation film 423, and on thesecond interlayer insulation film 423, a plurality of upper-layerwirings (resistive elements) 425 are formed.

These lower-layer wirings 421 and upper-layer wirings 425 arealternately disposed along one virtual line 420 having a number offlections. Moreover, in the second interlayer insulation film 423, aplurality of contact vias 424 are buried, by which the lower-layerwirings 421 and the upper-layer wirings 425 are electrically connectedin series. Note that, in this embodiment, one monitor pattern isobtained by combining the first to third monitor patterns 251 to 253described in the twenty-second embodiment.

In the same wiring layer as that of the lower-layer wirings 421, alattice lower-layer dummy pattern 422 is formed, which surrounds therespective lower-layer wirings 421 independently. Moreover, in the samewiring layer as that of the upper-layer wirings 425, a latticeupper-layer dummy pattern 426 is formed, which surrounds the respectiveupper-layer wirings 425 independently. Note that the upper-layer wirings425 positioned at ends of the monitor pattern extend out of theupper-layer dummy pattern 426 from notched portions of the upper-layerdummy pattern 426.

(Twenty-Seventh Embodiment)

Hereinafter, description will be made for a monitor pattern of asemiconductor device of a twenty-seventh embodiment of the presentinvention.

For example, in the sixth embodiment, the monitor pattern is constitutedby linearly arranging cells. Contrary to the above, in this embodiment,as shown in a top plan view of a cell in FIG. 81, cells are arranged bybeing tilted in an extension direction of the monitor pattern by anangle f

.

FIG. 82 is a top plan view showing a monitor pattern of thesemiconductor device of the twenty-seventh embodiment of the presentinvention, FIG. 83A is a cross-section view along I-I line of FIG. 82and FIG. 83B is a cross-section view along II-II line of FIG. 82.

A semiconductor substrate 501 is separated into a plurality of elementregions by an element separation film 502. In the element regions, aplurality of diffused resistors 503 are provided, which are formed byintroducing impurities at high concentration into the semiconductorsubstrate 501. Moreover, on the semiconductor substrate 501, aninterlayer insulation film 504 is formed. On this interlayer insulationfilm 504, a plurality of wirings (resistive elements) 506 are formed.

These diffused resistors 503 and wirings 506 are alternately disposedalong one virtual line 500 extending in the extension direction of themonitor pattern while turning zigzag. Note that the wirings 506 mutuallyadjacent to each other are disposed in such a manner that their centerlines intersect at 90 <angle. Moreover, in the interlayer insulationfilm 504, a plurality of contact vias 505 are buried, by which thewirings 506 and the diffused resistors 503 are electrically connected inseries.

Furthermore, on the interlayer insulation film 504, a lattice dummypattern 507 is formed, which surrounds the respective wirings 506independently. This dummy pattern 507 is formed in the same wiring layeras that of the wirings 506, and a space between the dummy pattern 507and the wirings 506 is set to, for example, 0.3 fÊm.

Also in this embodiment, the diffused resistors 503 are formedsimultaneously with source/drain of a transistor of a chip formationportion, the contact vias 505 are formed simultaneously with contactvias of the chip formation portion, and the wirings 506 and the dummypattern 507 are formed simultaneously with wirings of the chip formationportion.

Also in this embodiment, the space between the wirings 506 and the dummypattern 507 is set in accordance with, for example, the minimum spacebetween the wirings of the chip formation portion. Thus, an effectsimilar to that of the first embodiment can be obtained.

(Twenty-Eighth Embodiment)

FIG. 84 is a top plan view showing a monitor pattern of a semiconductordevice of a twenty-eighth embodiment of the present invention, FIG. 85Ais a cross-section view along I-I line of FIG. 84, and FIG. 85B is across-section view along II-II line of FIG. 84.

On the semiconductor substrate 501, a plurality of lower-layer wirings(resistive elements) 521 on a first interlayer insulation film (notshown) are formed. These lower-layer wirings 521 are covered with asecond interlayer insulation film 523, and on the second interlayerinsulation film 523, a plurality of upper-layer wirings (resistiveelements) 525 are formed.

These lower-layer and upper-layer wirings 521 and 525 are disposedalternately along one virtual line 520 extending in the extensiondirection of the monitor pattern while turning zigzag. Note that thelower-layer wirings 521 mutually adjacent to each other are disposed insuch a manner that their center lines intersect at 90 <angle.

In the second interlayer insulation film 523, a plurality of contactvias 524 are buried, by which the lower-layer wirings 521 and theupper-layer wirings 525 are electrically connected in series.

In the same wiring layer as that of the lower-layer wirings 521, alattice lower-layer dummy pattern 522 is formed, which surrounds therespective lower-layer wirings 521 independently. Moreover, also in thesame wiring layer as that of the upper-layer wirings 525, an upper-layerdummy pattern 526 is formed, which surrounds the respective upper-layerwirings 525 independently. Note that the upper-layer wirings 525positioned at ends of the monitor pattern extend out of the upper-layerdummy pattern 526 through notched portions of the upper-layer dummypattern 526.

Also in this embodiment, the lower-layer wirings 521 and the lower-layerdummy pattern 522 are formed simultaneously with lower-layer wirings ofthe chip formation portion, the contact vias 524 are formedsimultaneously with contact vias of the chip formation portion, and theupper-layer wirings 525 and the upper-layer dummy pattern 526 are formedsimultaneously with upper-layer wirings of the chip formation portion.

Also in this embodiment, the space between the lower-layer wirings 521and the lower-layer dummy pattern 522 and the space between theupper-layer wirings 525 and the upper-layer dummy pattern 526 are set inaccordance with, for example, the minimum space between the wirings ofthe chip formation portion. Thus, an effect similar to that of the firstembodiment can be obtained.

1. A method of manufacturing a semiconductor device comprising: forminga plurality of first resistive elements and a dummy pattern, which iselectrically isolated from the plurality of first resistive elements andwhich is formed beside one of the plurality of first resistive elements,on a semiconductor substrate, the forming of the plurality of firstresistive elements and the dummy pattern comprising: forming a conductorlayer on the semiconductor substrate, forming a mask layer on theconductor layer, and patterning the conductor layer to form theplurality of first resistive elements and the dummy pattern by using themask layer as a mask and by setting an aspect ratio between 3 and 5.2;forming an interlayer insulation film on the plurality of firstresistive elements and the dummy pattern; forming a plurality of contactvias, which are connected to the plurality of first resistive elements,in the interlayer insulation film; and forming a plurality of secondresistive elements, which are connected to the plurality of contactvias, on the interlayer insulation film, wherein the aspect ratio isdefined as (A+B)/C; where the A is a thickness of the conductor layer,the B is a thickness of the mask layer, and the C is a distance betweenthe one of the plurality of first resistive elements and the dummypattern.
 2. The method of manufacturing a semiconductor device accordingto claim 1, wherein a space between the one of the plurality of firstresistive elements and the dummy pattern is set equivalent to a minimumspace between wirings, which is decided based on design criteria.
 3. Themethod of manufacturing a semiconductor device according to claim 1,wherein a space between the one of the plurality of first resistiveelements and the dummy pattern is set equivalent to a minimum spacebetween wirings of a chip formation portion.
 4. The method ofmanufacturing a semiconductor device according to claim 1, wherein theconductor layer is formed of an aluminum layer.